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Plasma Nanoscience. Kostya Ostrikov
Техническая литература.Информация о книге
Название Plasma Nanoscience
Год выпуска 0
isbn 9783527623310
Автор произведения Kostya Ostrikov
Издательство John Wiley & Sons Limited
Аннотация
Filling the need for a single work specifically addressing how to use plasma for the fabrication of nanoscale structures, this book is the first to cover plasma deposition in sufficient depth. The author has worked with numerous R&D institutions around the world, and here he begins with an introductory overview of plasma processing at micro- and nanoscales, as well as the current problems and challenges, before going on to address surface preparation, generation and diagnostics, transport and the manipulation of nano units.