Скачать книгу

This is shown in Figure 3.7. It is clear that the transverse aberration is related to the angular difference between the wavefront and reference sphere surfaces.

      We now describe the WFE, Φ, as a function of the reference sphere (paraxial ray) angle, θ. The radius of the reference sphere (distance to the paraxial focus) is denoted by f. This allows us to calculate the difference in angle, Δθ, between the real and paraxial rays. This is simply equal to the difference in local slope between the two surfaces.

      (3.9)equation

      n is the medium refractive index.

      So, the transverse aberration may be represented by the first differential of the WFE with respect to the numerical aperture. In terms of third order aberration theory, the numerical aperture of an individual ray is directly proportional to the normalised pupil function, p. If the overall system, or marginal ray, numerical aperture is NA0, then the individual ray numerical aperture is simply NA0p. The transverse aberration is then given by:

      Applying these arguments to the analysis of the simple on-axis example illustrated earlier, with the object placed at the infinite conjugate, then the WFE can be represented by the following equation:

      (3.13)equation

      p is the normalised pupil function.

      In this instance, the plot has a characteristic ‘W’ shape, with the curve in the vicinity of the origin dominated by the quadratic defocus term. As with the case for transverse aberration, the defocus can be optimised to produce the minimum possible OPD value when taken as a root mean squared value over the circular pupil. Again, using a weighting factor that is proportional to the pupil function, p, (to take account of the circular geometry), the mean squared OPD is given by:

Geometrical illustration of a plot of the OPD against the normalised pupil function—OPD fan. Graphical illustration of an OPD fan with aberration plus balancing defocus.

      The above expression has a minimum where α = −¾. To understand the magnitude of this defocus, it is useful first to convert the new OPD expression into a transverse aberration using Eq. (3.12).

Скачать книгу