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12 Mβ M4–N6 52 Kβ1,3 K–M2,3 15 Lγ1 L2–N4 6 Mγ M3–N5 5 Kβ2,4 K–N2,3 3 Ll L3–M1 5 Lβ3 L1–M3 10 Lβ4 L1–M2 7 Lη L2–M1 5 Chart depicting the probability for the emission of an X-ray photon depending on the atomic number, which is called fluorescence yield. equation

      2.2.3 Nomenclature of X-ray Lines

      Two nomenclatures are used to designate the X-ray lines. The older is based on the fixed intensity ratios of the individual lines and was introduced by Siegbahn (1923). It also shows the development of the performance of X-ray spectrometers, in particular their energy resolution. For the first instruments, only the distinction between K-, L-, and M-lines was possible. With the improvement of the resolution, a splitting of these lines was then discovered, i.e. α-, β-, and γ-lines could be distinguished. Later, further splittings were detected, which are denoted by indices.

      

      2.2.4 Interaction of X-rays with Matter

      X-radiation interacts with matter – it will be scattered and absorbed. This process is described by Lambert–Beer's law.

      (2.5)equation

I intensity after absorption in a layer
D thickness of the layer
P density of the layer
M mass attenuation coefficient of the layer material
I 0 primary intensity

      The mass attenuation coefficient μ has several contributions. At low energies, the absorption described by the photoionization coefficient τ is dominant; the influence of the scattering characterized by the scattering coefficient σ increases with energy, and in the case of energies >1.2 MeV the electron pair production described by κ gains importance. However, this is outside the range of energy that is of interest for X-radiation.

      (2.6)equation

      2.2.4.1 Absorption

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