LITMIR.BIZ

This edition first published 2022

      Copyright © 2022 by The Institute of Electrical and Electronics Engineers, Inc. All rights reserved.

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      Published simultaneously in Canada.

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       Library of Congress Cataloging-in-Publication Data

      Names: Bardos, Ladislav, 1947- author. | Barankova, Hana, 1951- author.

      Title: Microwave plasma sources and methods in processing technology / Ladislav Bardos, Hana Barankova, Uppsala University, Uppsala, Sweden.

      Description: Hoboken, New Jersey : John Wiley & Sons, 2022. | Includes bibliographical references and index.

      Identifiers: LCCN 2021031913 (print) | LCCN 2021031914 (ebook) | ISBN 9781119826873 (hardback) | ISBN 9781119826880 (pdf) | ISBN 9781119826897 (epub) | ISBN 9781119826903 (ebook)

      Subjects: LCSH: Electromagnetism.

      Classification: LCC QC760 .B267 2022 (print) | LCC QC760 (ebook) | DDC 660/.044--dc23

      LC record available at https://lccn.loc.gov/2021031913 LC ebook record available at https://lccn.loc.gov/2021031914

      Cover image: © Image courtesy of the authors

      Cover design by Wiley

      Set in 9.5/12.5pt STIXTwo Text by Integra Software Services, Pondicherry, India

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